Data set: silicium tetrafluoride (03.00.004)
Other versions: 03.00.001 03.00.000| Processes with this flow as input / output | View complete dataset | Download data set as XML file |
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Type Elementary flow |
Name silicium tetrafluoride |
Reference Flow Property Mass (kg) |
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Categorization Emissions / Emissions to air / Emissions to air, unspecified |
Synonyms ABTOQLMXBSRXSM-UHFFFAOYSA-;AC1L2NIN;AC1Q4HK1;PC6346;Perfluorosilane;SILICON TETRAFLUORIDE;Silane, tetrafluoro-;Silicon fluoride (SiF4);Silicon(IV) fluoride;Tetrafluorosilane |
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CAS Number 7783-61-1 |
EC number |
Sum Formula |
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General comment Reference elementary flow of the International Reference Life Cycle Data System (ILCD). |